Nitridation of large silicon surfaces at low temperatures by electron cyclotron resonance plasma 等離子體對硅表面的低溫大面積氮化
To overcome the bottle - neck , electron cyclotron resonance - plasma enhanced metalorganic chemical vapor deposition was developed 為了解決這一問題,電子回旋共振ecr等離子體增強有機金屬氣相沉積( ecr - pemocvd )應(yīng)運而生。
Microwave electron cyclotron resonance ( mwecr ) cvd is a newly developed technique for plasma processing and materials fabrication , such as plasma etching and films deposition 本論文介紹了我們對ecr等離子體cvd系統(tǒng)的測試、 bn薄膜的制備和薄膜光學(xué)特性研究。
Yak hairs were treated by the microwave electron cyclotron resonance plasma reactive ion etching ( ecr - rie ) equipment to improve its property of weave 摘要采用微波電子回旋共振等離子體反應(yīng)離子刻蝕( ecr - rie )裝置對牦牛毛纖維進(jìn)行表面改性,從而改善牦牛毛的可紡性。
Sub - thesis is mainly on the test and research of the photoelectric properties of a - si : h thin film deposited by microwave electron cyclotron resonance chemical vapor deposition ( mw - ecr cvd ) system 本論文主要是對mw - ecrcvd系統(tǒng)沉積的a - si : h薄膜進(jìn)行了一系列的光電特性的測試研究工作。
Electron cyclotron resonance is a phenomenon observed in plasma physics, condensed matter physics, and accelerator physics. An electron in a static and uniform magnetic field will move in a circle due to the Lorentz force.